Hi Andrea,

if i well understeand you would to obtain with S1813 an angle of about 90°
is that RighT?

----- Original Message -----
From: "Andrea Mazzolari" 
To: "General MEMS discussion" 
Sent: Sunday, January 17, 2010 2:20 PM
Subject: [mems-talk] S1813 vertical sidewalls


> Hi All,
>
> i need to pattern S1813 with vertical sidewalls, but at the present time i
> get an angle of about 54 deg. Awful...
> My maskaligner is an old karl suss.
>
> Here is my procedure:
> -spinning of S1813
> -soft bake 3 min at 115 deg
> -photolitography in contact mode (150mJ)
> -development in MF319 (about 45 seconds)
> -hard bake 15 min at 115.
>
> Any suggestion to improve the sidewall angle ?
>
> Best regards,
> Andrea