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MEMSnet Home: MEMS-Talk: Roughening GaAs substrate
Roughening GaAs substrate
2010-01-20
Andy Irvine
2010-01-20
Brad Cantos
2010-01-20
Brent Garber
2010-01-21
Andy Irvine
2010-01-21
Brad Cantos
Roughening GaAs substrate
Andy Irvine
2010-01-21
Thanks Brad and Brent for some good ideas.  I guess mechanical is the
way to go - I can access the right sort of grinding sludge.

Brad - if you managed that, I take my hat off to you!

Cheers all,

Andy

Brent Garber wrote:
> Andy,
> I can't say I have done this before, but you may find Di : H2O2 : H3PO4
> (1:4:3) will work for you @ 38 degrees.
> I do it mechanically as I can't have anything happen to my front side.
> Brent
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