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MEMSnet Home: MEMS-Talk: KOH+IPA
KOH+IPA
2010-01-24
Andrea Mazzolari
2010-01-25
Maria Matschuk
2010-01-26
[email protected]
KOH+IPA
Andrea Mazzolari
2010-01-24
Hi All,

i need to realize (110) oriented vertical sidewalls in (110) silicon wafers.
I've found that addition of IPA to KOH changes the etch rates and should
provide this result. I do not have any information on the needed IPA
quantity to be addeded to the solution.

Any suggestion, please ?

Thanks,
Andrea

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