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MEMSnet Home: MEMS-Talk: Titanium etching
Titanium etching
2010-01-25
helene viatge
2010-01-25
leiwangsdu
2010-01-26
Fei Wang
2010-02-01
helene viatge
2010-02-04
Gabriel Roupillard
Titanium etching
helene viatge
2010-01-25
Hello everybody,

I am quite a novice on the subject, but I would like to know if it is possible
to etch a layer of titanium vertically on 300 µm and how isotropic is it? Do you
have any idea of how the etching can affect the surrounding parts?

Moreover is the bonding strength of TiO2 on Ti higher than SiO2 on Ti?

Thanks a lot for your help,

Have a good day,

Helen.
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