Hi Will,

Xenon difluoride should not etch copper so it sounds like it should work well
for you application.

Kyle S. Lebouitz, Ph.D.
CTO & Founder
XACTIX, Inc.
2403 Sidney St - Suite 300
Pittsburgh, PA 15203
(412) 381-3195 -- phone
(412) 381-1136 -- fax
(412) 680-1173 -- cell
[email protected]  -- e-mail
www.xactix.com

 >>  Hello all,

 >>  I would like to etch Si with XeF2 gas. But my sample contains
 >>  electroplated copper.

 >>  Does anyone know if XeF2 will etch copper or not?

 >>  Thanks,
 >>  Will