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MEMSnet Home: MEMS-Talk: SU-8 selection 2075 or 2100
SU-8 selection 2075 or 2100
2010-01-29
Sheng Zhang
2010-01-31
Liang Zhao
2010-01-31
[email protected]
2010-02-01
[email protected]
2010-02-01
Gareth Jenkins
SU-8 selection 2075 or 2100
Sheng Zhang
2010-01-29
Hi, all,

I need to decide which SU-8 to purchase, 2075 or 2100. I will use SU-8 to
build a 150um~200um structure.

The datasheets suggests both of them can achieve ~ 200um thickness. The
difference is spin speed - higher for 2010 because of its higher viscosity.

I think using higher spin speed would result in better thickness uniformity,
but I'm afraid with relative higher viscosity 2010 might be harder to handle
(especially when dropping/pouring out of bottle)...

Another question: where do you keep the resist? Get some in a small bottle
or just keep them in the original bottle?

And under what temperature? My cleanroom keeps all the photoresist in a
fridge..I think that would make 2075/2010 even harder to handle when they
are cold...

Any suggestion?

Thanks!
Sheng
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