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MEMSnet Home: MEMS-Talk: dice Pyrex wafer with SU-8 structures
dice Pyrex wafer with SU-8 structures
2010-02-10
Hong Wang
2010-02-11
Shay Kaplan
dice Pyrex wafer with SU-8 structures
Hong Wang
2010-02-10
Hello, I'm wondering what is the best way to dice 4 inch 500um thick pyrex wafer
with SU-8 structure on it to ~1cm by 1cm small pieces. Any company can do it?
Thank you, Hong
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