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MEMSnet Home: MEMS-Talk: resist peeled off as a sheet
resist peeled off as a sheet
2010-02-12
Paul Nguyen
2010-02-12
Bill Moffat
2010-02-12
Yifan Wu
2010-02-12
Gareth Jenkins
2010-02-12
mikas remeika
resist peeled off as a sheet
Gareth Jenkins
2010-02-12
I also only have experience of SU-8 but another possibility is insufficient
exposure dose.

Negative resists expose from the "top down" and not enough energy can lead
to everything lifting off. Maybe your lamp is getting old?

On Fri, Feb 12, 2010 at 16:34, Yifan Wu  wrote:

> Paul,
>
> As my experience on SU-8, thermal shock is one reason for peeling off. I
> don't know about BPR100, but it might be the cause.
>
> Yifan
reply
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