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MEMSnet Home: MEMS-Talk: Thin layer silver (~30nm) deposition
Thin layer silver (~30nm) deposition
2010-02-14
Meir Grajower
2010-02-15
Ruiz, Marcos Daniel (SENCOE)
Thin layer silver (~30nm) deposition
Meir Grajower
2010-02-14
Hi All,

I want to deposit a thin layer (~30nm) of silver on glass. So, I cleaned the
glass and evaporate (EBPVD) silver on it, the chamber temperature was 21C.
The results were not good - the layer was not uniform and had a lot of
big nucleus of silver.

Is it possible to make\deposit a uniform layer of silver (or gold) of ~30nm?
if so, how should i do it?

Please help :)
reply
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