MEMS-talk

News	MEMSnet Home: MEMS-Talk: Wet-chemical etching of Au without etching Al Wet-chemical etching of Au without etching Al 2010-02-15 Lisa Gades 2010-02-16 Dave Lewis 2010-02-16 Andy Irvine 2010-02-16 Dave Lewis 2010-02-16 Kevin Paul Nichols 2010-02-16 David Roberts 2010-02-17 Lisa Gades 2010-02-17 David Springer 2010-02-19 Lisa Gades Wet-chemical etching of Au without etching Al Dave Lewis 2010-02-16 http://grover.mirc.gatech.edu/processing/Etchants.pdf Sorry about the broken link. It should work now. Regards, Dave Lewis Sensor R&D Lake Shore Cryotronics -----Original Message----- From: [email protected] [mailto:[email protected]] On Behalf Of Andy Irvine Sent: Tuesday, February 16, 2010 12:32 PM To: General MEMS discussion Subject: Re: [mems-talk] Wet-chemical etching of Au without etching Al The link doesn't work for me, Dave. Could you check? reply
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