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MEMSnet Home: MEMS-Talk: SiGe deposition
SiGe deposition
2010-02-17
Andrea Mazzolari
2010-02-17
Albert Henning
2010-02-18
Johnson, Stafford
2010-02-18
Wendell McCulley
2010-02-19
Andrea Mazzolari
2010-02-20
Ned Flanders
2010-02-24
Roger Brennan
SiGe deposition
Andrea Mazzolari
2010-02-17
Hi all,

i need to grow by epitaxy SiGe and Ge on Si (100).
I'm very new to this.

1) May someone suggest milestone papers in this field ?

2) is it needed to "prepare" the si surface before deposition ? In
particular i guess it is needed to remove native oxide by hf. Are other
operations needed to prepare the Si surface ?

Thanks,
Andrea

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