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MEMSnet Home: MEMS-Talk: Solubility and Diffusivity of Phosphorus in Silicon
Solubility and Diffusivity of Phosphorus in Silicon
2010-02-24
Sofiane Borji
Solubility and Diffusivity of Phosphorus in Silicon
Sofiane Borji
2010-02-24
Hello,

I would very much appreciate if anybody could provide me with the
following:

Diffusivity (cm2/s) and solubility  of  P in Si.

I am mostly interested in values at a temperatures above 800 C.
In Order to simulate the Emitter-Profile of Solar-Cells.

I would greatly appreciate your help if or you can recommend a
reference, web site orany info.

Thank you

Sofiane Borji
reply
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