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MEMSnet Home: MEMS-Talk: Spin-on-glass
Spin-on-glass
2010-02-24
[email protected]
2010-03-05
Nathan McCorkle
Spin-on-glass
[email protected]
2010-02-24
Hi all,

I am planning to use spin-on-glass. Could you tell me if there are any
process tricks to cover highly non-planar devices like adjusting viscosity,
coating rpm etc.?

Furthermore I need a SiOx of very low thermal conductivity. Could you tell
me any supplier which meets my requirements?

Thank you in advance

* Dr. Daniel Grimm
* IFW Dresden
*            - Institute for Integrative Nanosciences -
* E-Mail:  [email protected]
* Phone: +49 351 4659-314
* Mobile: +49 177 4926561


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