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MEMSnet Home: MEMS-Talk: Small Silicon Wafer Piece Cleaning
Small Silicon Wafer Piece Cleaning
2010-03-09
Li. Zhang
2010-03-09
Tony Price
2010-03-10
A.ALLOUCH
2010-03-19
mikas remeika
2010-03-10
Li. Zhang
2010-03-10
Tony Price
Small Silicon Wafer Piece Cleaning
Li. Zhang
2010-03-10
Hi Tony,

Thanks for your suggestion. It is very helpful and I'm gonna try on it.
I have one more small question. Do you bake the wafer piece after USB in
methanol or you just directly spin adhesion promoter or PR after this step?

Thanks,

Li. Zhang
---------
Graduate Student
Edward P. Fitts Department of Industrial and Systems Engineering
North Carolina State University
Raleigh, NC 27695-7906
USA
TEL: (919) 413-5459
Email: [email protected]
Web:  http://www.ise.ncsu.edu
         http://www.nnf.ncsu.edu
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