Hi all,

I'm doing lift-off using ultrasonic bath after soak my samples in NMP
overnight. However, some parts are difficult to be lifted off.
Thus, I increased the ultrasonic cleaning duration. But I'm afraid a long
ultrasonic cleaning (20-30min) might damage the metal film which is 150nm
sputtered Al.

Would that be a problem?

Thanks,

Li. Zhang
---------
Graduate Student
Edward P. Fitts Department of Industrial and Systems Engineering
North Carolina State University
Raleigh, NC 27695-7906
USA
TEL: (919) 413-5459
Email: [email protected]
Web:  http://www.ise.ncsu.edu
         http://www.nnf.ncsu.edu