Hello,
Many thanks to those who responded to my question regarding curling of
comb fingers.  Some clarifications:
1. the structural material is polysilicon
2. the thickness is 2 microns
3. the fingers are curved (as opposed to straght fingers) with a
curvature of 5 microns over the length of 150 microns.

Again, I appreciate the responses.

Regards,
--
Ying Hsu
Irvine Sensors
Costa Mesa, California