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MEMSnet Home: MEMS-Talk: Ni-Fe etchant
Ni-Fe etchant
2010-03-17
Pavan Samudrala
2010-03-17
Greg Ostrowicki
2010-03-18
Xiaoguang Liu
Ni-Fe etchant
Pavan Samudrala
2010-03-17
Hello all,

I was wondering if any of you have worked on etching Ni-Fe. I am currently
using Ni Etchant type 1 from Transene and it gives huge undercut during
etching. Undercut is close to 10 times the actual thickness to be etched.
Does anyone have experience etching Ni-Fe with any other etchant with
minimal undercut?

Thanks,

Pavan Samudrala
reply
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