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MEMSnet Home: MEMS-Talk: Ni-Fe etchant
Ni-Fe etchant
2010-03-17
Pavan Samudrala
2010-03-17
Greg Ostrowicki
2010-03-18
Xiaoguang Liu
Ni-Fe etchant
Greg Ostrowicki
2010-03-17
In my experience etching copper, which can also suffer from severe undercut,
diluting the etchant significantly along with mild agitation reduced
undercuts from ~10x to ~3x.

Regards,
Greg Ostrowicki


On Wed, Mar 17, 2010 at 3:46 PM, Pavan Samudrala
wrote:

> Hello all,
>
> I was wondering if any of you have worked on etching Ni-Fe. I am currently
> using Ni Etchant type 1 from Transene and it gives huge undercut during
> etching. Undercut is close to 10 times the actual thickness to be etched.
> Does anyone have experience etching Ni-Fe with any other etchant with
> minimal undercut?
>
> Thanks,
>
> Pavan Samudrala
reply
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