A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ni-Fe etchant
Ni-Fe etchant
2010-03-17
Pavan Samudrala
2010-03-17
Greg Ostrowicki
2010-03-18
Xiaoguang Liu
Ni-Fe etchant
Xiaoguang Liu
2010-03-18
Hi Greg

May I know what type of copper etchant you are using?

Best
Leo

On Wed, Mar 17, 2010 at 6:48 PM, Greg Ostrowicki
 wrote:
> In my experience etching copper, which can also suffer from severe undercut,
> diluting the etchant significantly along with mild agitation reduced
> undercuts from ~10x to ~3x.
>
> Regards,
> Greg Ostrowicki

--
Xiaoguang "Leo" Liu
Electrical and Computer Engineering
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
[email protected]
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
University Wafer