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MEMSnet Home: MEMS-Talk: pit under microheater
pit under microheater
2010-03-21
prateek garg
2010-03-25
Miyakawa, Natsuki
2010-03-23
RenSen
2010-03-23
prateek garg
2010-03-24
faizal
2010-03-25
RenSen
pit under microheater
prateek garg
2010-03-21
hi all,

i want to make a pit under microheater (of dimensionn 200x200 micrometer).
at the bottom there is silicon layer of 500 micron. above silicon layer
there is silicon oxide layer of 10micron.
above silicon oxide there is microheater.
i want to make pit under silicon oxide so that there will be no heat loss
due to conduction.

thank you
reply
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