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MEMSnet Home: MEMS-Talk: Does ultrasonic damage metal film during lift-off?
Does ultrasonic damage metal film during lift-off?
2010-03-16
Li. Zhang
2010-03-16
Harsh Sundani
2010-03-17
mikas remeika
2010-03-17
Bill Moffat
2010-03-18
Enrique San Andrés Serrano
2010-03-25
Li. Zhang
Does ultrasonic damage metal film during lift-off?
Li. Zhang
2010-03-25
Yes, I also use NMP for liftoff. I compared the results after I soaked one
sample in NMP and the other in acetone overnight.
It seems to me that NMP works better than acetone. Does anyone have the same
experience?

Li. Zhang
Graduate Student
Edward P. Fitts Department of Industrial and Systems Engineering
North Carolina State University
Raleigh, NC 27695-7906
USA
TEL: (919) 413-5459
Email: [email protected]
Web:  http://www.ise.ncsu.edu
         http://www.nnf.ncsu.edu
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