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MEMSnet Home: MEMS-Talk: SU-8 Lift off KOH
SU-8 Lift off KOH
2010-04-28
Darren Alvares
SU-8 Lift off KOH
Darren Alvares
2010-04-28
Hi All,

I am planning on using SU-8 as a sacrificial mould for PDMS. After screen
printing the PDMS I would like to lift off the mould. I am thinking of using
KOH. The does have some effect on the PDMS but not a significant amount.

Anyone have any experiences to share on SU-8 (post exposed) lift off using KOH
before I try it myself?

Darren Alvares
Post-Graduate Student
Graduate School of Biomedical Engineering
 University of New South Wales
UNSW Sydney NSW 2052 Australia
[email protected]


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