I think it means it can be fabricated using CMOS tools and materials. Bulk
machining is not CMOS compatible, some surface machining is.

But I'm guessing myself,

Robert

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Alex
Mellnik
Sent: Wednesday, May 12, 2010 10:37 AM
To: General MEMS discussion
Subject: Re: [mems-talk] what CMOS compatible means exactly

Hi,

See page 2 of http://www.cnf.cornell.edu/doc/Compatibility_Policy.pdf for
one explanation of it.

-Alex