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MEMSnet Home: MEMS-Talk: what CMOS compatible means exactly
what CMOS compatible means exactly
2010-05-12
Yu Chen
2010-05-12
Alex Mellnik
2010-05-13
Robert Black
2010-05-14
Yu Chen
2010-05-14
Andrew Irvine
2010-05-14
Marc Reinig
2010-05-17
Rabah Hanfoug
what CMOS compatible means exactly
Yu Chen
2010-05-14
for a standard CMOS cleanroom.
that materials are allowed and not allowed?

I know that CMOS cleanroom usually do not use liftoff process.
Is there any other process are not prefered in CMOS cleanroom, but
frequently used in other lower level lab?

best

Yu CHEN

On Fri, May 14, 2010 at 4:39 AM, Robert Black  wrote:

> I think it means it can be fabricated using CMOS tools and materials. Bulk
> machining is not CMOS compatible, some surface machining is.
>
> But I'm guessing myself,
>
> Robert
reply
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