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MEMSnet Home: MEMS-Talk: HNA etching protective layer
HNA etching protective layer
2010-05-17
Javier Crespo
HNA etching protective layer
Javier Crespo
2010-05-17
Dear all,

Does anyone know any protective layer for HNA etching? I'm looking for
any wax/resist for coating backside of silicon wafers with good
resistance to wet etching (HNA etching). This layer should be removed in
a plasma asher system.

Thanks,
reply
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