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MEMSnet Home: MEMS-Talk: SiO2 under-etch
SiO2 under-etch
2010-05-29
priyesh dhandharia
2010-05-29
Prasanna Srinivasan
2010-05-30
priyesh dhandharia
2010-05-31
[email protected]
SiO2 under-etch
priyesh dhandharia
2010-05-29
Hi all,

As a part of my project I have deposited 500 micron SiC film strips on
Si/SiO2 wafer. SiO2 wafer is 1 micron thick. Now I want to etch SiO2 so that
I can make a bridge. I have tried to etch SiO2 with concentrated HF for 1.5
hrs but SiO2 layer is still there. Please help me.

Thank You very much,
Priyesh Dhandharia,
M.Tech (Materials Science)
IIT Bombay
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