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MEMSnet Home: MEMS-Talk: wet etching on 110 wafer
wet etching on 110 wafer
2010-05-30
[email protected]
2010-05-31
Andrea Mazzolari
2010-06-03
Fei Wang
wet etching on 110 wafer
[email protected]
2010-05-30
 hi,

I need your advice on how to etch a rectangular pattern on <110> silicon wafer

tehran polytechnic university
[email protected]
reply
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