I may disagree with Paul.  HMDS is not a glue it changes the surface
tension to match with the surface tension of the liquid being applied.
If you apply for too long a prime time you can get overpriming and
liquids just slide off.  Too much HMDS may help your PI peel off.

Bill Moffat

________________________________

From: [email protected] on =
behalf of Paul Nguyen
Sent: Fri 6/4/2010 9:18 AM
To: [email protected]
Subject: Re: [mems-talk] P1-2525 remove from Si



 Hi Darren,

I'd agree with Huihang on not using any glue layer such as HMDS if you want
to have PI peeled off after develop.  You may increase the develop time to
2x or 3x for the same purpose.

Hope this helps,
Paul