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MEMSnet Home: MEMS-Talk: Germanium cleaning
Germanium cleaning
2010-06-09
Andrea Mazzolari
Germanium cleaning
Andrea Mazzolari
2010-06-09
Hi all,

i need to clean some germanium wafers.
I can not use RCA cos it contains H2SO4 and H2O2. Such agents are etching
germanium very fast.

What can be used for Germanium cleaning ?

Best regards,
Andrea

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