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MEMSnet Home: MEMS-Talk: P1-2525 remove from Si
P1-2525 remove from Si
2010-06-03
Darren Alvares
2010-06-03
Huihang Dong
2010-06-07
Darren Alvares
2010-06-07
Huihang Dong
2010-06-04
Paul Nguyen
2010-06-06
Bill Moffat
2010-06-10
Darren Alvares
2010-06-12
Bill Moffat
2010-06-15
Darren Alvares
P1-2525 remove from Si
Bill Moffat
2010-06-12
Darren,
           Polyimide adhesion to glass is easy.  Use an adhesion
promoter very like using HMDS for resist adhesion to Silicon.  In this
case use APTES.  Bill Moffat

________________________________

From: [email protected] on =
behalf of Darren Alvares
Sent: Thu 6/10/2010 4:27 PM
To: [email protected]
Subject: Re: [mems-talk] P1-2525 remove from Si



Hi All,

Thanks for that. Any idea about polyimide to glass? Does that work the =
same way. In essence I just need some rigid substrate to start of with.

Cheers,

Darren Alvares
Graduate Student
Graduate School of Biomedical Engineering
University of New South Wales
UNSW Sydney NSW 2052 Australia
[email protected]

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