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MEMSnet Home: MEMS-Talk: P1-2525 remove from Si
P1-2525 remove from Si
2010-06-03
Darren Alvares
2010-06-03
Huihang Dong
2010-06-07
Darren Alvares
2010-06-07
Huihang Dong
2010-06-04
Paul Nguyen
2010-06-06
Bill Moffat
2010-06-10
Darren Alvares
2010-06-12
Bill Moffat
2010-06-15
Darren Alvares
P1-2525 remove from Si
Darren Alvares
2010-06-15
Hi All,

Thanks for that. Any ideas about polyimide to glass?
Does that work the same way?
In essence I just need some rigid substrate to start of with.

Cheers,

Darren Alvares
Graduate Student
Graduate School of Biomedical Engineering University of New South Wales UNSW
Sydney NSW 2052 Australia [email protected]

> ---------- Forwarded message ----------

Hi Darren,

I'd agree with Huihang on not using any glue layer such as HMDS if you want to
have PI peeled off after develop.  You may increase the develop time to 2x or 3x
for the same purpose.

Hope this helps,

Paul
reply
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