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MEMSnet Home: MEMS-Talk: Etching indium
Etching indium
2010-06-23
Andrew Irvine
2010-06-23
Brent Garber
2010-06-24
Andrew Irvine
Etching indium
Andrew Irvine
2010-06-23
Hi all.

Anyone out there have to etch indium from the back surface of their GaAs
wafers after MBE growth?

Any thoughts on how I can do it?

Boiling conc HCl seems to do half a job (some kind of rough residual
crud left over), and I can't find a suitable way of protecting the
epitaxial surface.

Yep, I'm asking the growers too!

Many thanks,

Andy

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