Holy cow... are you sure this won't explode?
Jie
On Wed, Jun 23, 2010 at 1:26 PM, Jesse D Fowler wrote:
> Piranha (in my case 4:1 H2SO4 : 30%H2O2) boils at 160C. It is much more
> aggressive at this temperature. (also very dangerous!)
>
>
> ----- original message ----
> From: antwi nimo
> To: [email protected], General MEMS discussion
> Date: 06/23/2010 09:47 AM
> Subject: Re: [mems-talk] Removing hard-baked photoresist
>
>
> A mixture of H2SO4 and H2O2 at a temperature of ~180celsius can remove
> the resist...This solution is used the remove resist when making glass
> mask...I am sure it can remove this resist to.....i hope this information
> helps,
> Nimo
* Zou Jie (Jay)
* Department of Physics
* University of Florida
* Tel: +1-352-846-8018
* Email: [email protected]
* Homepage: http://plaza.ufl.edu/zoujie/