I used to pattern Pyrex for bonding with SOI and it works OK


________________________________
From: Darren Alvares 
To: "[email protected]" 
Sent: Tue, June 29, 2010 5:16:47 AM
Subject: [mems-talk] Glass Substrate Or Not

Hi All,

I am toying with the idea of using glass as a substrate for my application. I
was wondering if anyone has any insights into the challenges of doing this.

*         I will be spinning and baking polyimide PI2525.

*         I will then pattern photoresist AZ6632

*         Evaporate Ti/Au 10/100nm and then perform lift-off using NMP.

After some additional steps I would like to peel the polyimide with the device
of the glass substrate. I am assuming the polyimide glass interaction should be
the same as the polyimide SiO2 interaction. A few people have confirmed in
earlier posts that I can do this.

Thanks,

Darren Alvares