How thick is your membrane?  What is the size of your actuators?  How are
you measuring deformation?  Could you see a 100nm deformation?

Marco
________________________________________________________________
Marc Reinig                           Phone: (831) 459-4362
Laboratory for Adaptive Optics        Fax:   (831) 459-2298
UCO/Lick                              Email: [email protected]
University of California, Santa Cruz
1156 High Street
Santa Cruz, CA 95064

> -----Original Message-----
> From: [email protected] [mailto:mems-
> [email protected]] On Behalf Of
> [email protected]
> Sent: Sunday, June 27, 2010 8:08 PM
> To: [email protected]
> Subject: [mems-talk] About electrostatic actuation of Si membrane
>
> Hi all,
>     I'm working on a membrane mirror research, the mirror was
> fabricated by anodic bonding of Pyrex 7740 glass to Si wafer.  My idea
> is, by applying voltage between the Al electrodes patterned on glasss
> wafer and the Silicon membrane , the membrane will deform through the
> air gap under the electrostatic force. But, terriblly, obviously no
> deformation was observed when even a 300 V voltage is applied and the
> air gap is only 20 microns. I have tested the whole structure and I'm
> sure that there is no short circuit between the membrane and the Al
> electrode, now, I'm desperate and I hope anyone can save me.
>
>  Joe