Hi, Maggie,

If you have a hard time dealing with vapor phase SAM coating, try liquid phase
SAM coating.
Since you are trying to coat glass master mold, liquid phase SAM will work.

I have same fluorinated tricolosilane,
(HEPTADECAFLUORO-1,1,2,2-TETRAHYDRODECYL)TRICHLOROSILANE, and I have no hard
time to form SAM layer on the glass substrate with liquid phase SAM coating.
Moreover, the durability of SAM is stronger in liquid phase SAM than in vapor
phase SAM.

There are plenty of papers concerning liquid phase SAM technique, so you will
easily find the recipe.

Good luck,

Hyoungwon Park

-----Original Message-----
From: "Maggie Q. Lai"<[email protected]>
To: "General MEMS discussion"<[email protected]>
Cc:
Sent: 10-06-30(수) 14:13:39
Subject: [mems-talk] releasing layer for PDMS mold
Hi,
I am trying to coat my glass master mold with with some releasing agent for
PDMS mold.
I found from a lof of papers that it is a common practice to treat the
substrate using fluorinated tricholosilane vapor in a vacuum desiccator to
form a monolayer on the substrate. But I tried with
(HEPTADECAFLUORO-1,1,2,2-TETRAHYDRODECYL)TRICHLOROSILANE (C10H4Cl3F17Si )
from Gelest, but even before I started pumping the desiccator the liquid
silane on the pippet tip and on the wall of the vial already became some
kind of white foam. Consequently the anti-adhesion layer didn't work well.
I am aware that the silane may react with the water in the air, but how can
I avoid that? Seems people always use it just in a fume hood, not a
glovebox. Is there something I am missing? Can you please give me some
solution? Suggestion on alternative way for releasing layer is also
welcome.

Thanks.

Maggie


Park, Hyoungwon
Research Assistant,
Nano Materials and Devices Laboratory,
Department of Materials Science and Engineering,
Korea University
Tel: +82-2-3290-3811
Cell: +82-11-9733-1123
E-mail: [email protected] / [email protected]