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MEMSnet Home: MEMS-Talk: SF6 / BCl3 issue
SF6 / BCl3 issue
2010-07-07
John Montoya
2010-07-07
Brent Garber
2010-07-07
Bill Moffat
2010-07-07
Glenn Silveira
2010-07-08
John Montoya
2010-07-08
Andrew Irvine
2010-07-10
Philip Lau
2010-07-11
Brian Stahl
SF6 / BCl3 issue
Andrew Irvine
2010-07-08
John

I think perhaps you should re-read the bit about BCl3 without the
rose-tinted specs on.

Andy

On Jul 8 2010, John Montoya wrote:

>So, other than standard machine maintenance, such as
>replacing filters, using oil pumps, and storing the
>required gases safely, there is no hazardous safety
>concern associated with SF6 and BCl3?  Sorry, I just want
>to make sure I have everything clear... Any trouble
>associated with disposing the SF6 and BCl3 gas once used?
reply
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