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MEMSnet Home: MEMS-Talk: Is it possible to grow Si or SiO2 or SiN on top of Ni films?
Is it possible to grow Si or SiO2 or SiN on top of Ni films?
2010-07-13
Xiaohui Lin
Is it possible to grow Si or SiO2 or SiN on top of Ni films?
Xiaohui Lin
2010-07-13
Hi, everyone:

     I have glass samples coated with 50nm Ni (by e-beam evaporation)

     Just wondering if it is possilbe to grow another layer of material on
top of it.  We need the thickness to be around 500-800nm, and it should be
able to be vertically etched (after patterning the resist) to expose the
bottom Ni.

    For Si, SiO2 and SiN,  which has the potential to achieve that?

   Any suggestions? Thanks
reply
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