A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: rib waveguide using dry etch
rib waveguide using dry etch
2010-07-22
杜 彦召
2010-07-22
Pramod Gupta
2010-07-22
Bill Moffat
2010-07-26
杜 彦召
rib waveguide using dry etch
杜 彦召
2010-07-26
Hi Pramod Gupta:

I am etching silicon waveguide for optical communication.

Does anyone know how to inspect the rib waveguide sidewall roughness in mass
production?

Thanks
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Tanner EDA by Mentor Graphics
Nano-Master, Inc.
The Branford Group