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MEMSnet Home: MEMS-Talk: anodic bonding of thicker glass
anodic bonding of thicker glass
2010-07-27
Halalo
anodic bonding of thicker glass
Halalo
2010-07-27
Hello all,

I am trying to find the optimal parameters for a bond process which I used
to do with a certain glass thickness. Now I want to use another thickness
and I'm not sure if I should change the voltage. As I know from the bond
process theory, the voltage is necessary to produce a certain electro static
clamping force. The ESC depends on the thickness of the depletion layer.
Glass is going to be (almost) conductive at bond temperature next to Tg.
This would mean, that the bond voltage is independent of the glass
thickness. Is that alright?

Thanks


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