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MEMSnet Home: MEMS-Talk: Lift-off Oxide on Silicon with PMMA mask?
Lift-off Oxide on Silicon with PMMA mask?
2010-08-03
Jie Zou
Lift-off Oxide on Silicon with PMMA mask?
Jie Zou
2010-08-03
Hi pals,

anyone have experience with lifting-off Oxide on Silicon with PMMA
mask? PMMA will be ~350nm. It is patterned by e-beam lithography. I
am planned to e-beam evaporate ~100nm oxide on the silicon. Anything I
need to pay attention to? Like the adhesion?

Thanks.

Jie
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