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MEMSnet Home: MEMS-Talk: Undercut mechanism at Cr-Au interface
Undercut mechanism at Cr-Au interface
2010-08-10
Robert MacDonald
2010-08-10
Kevin Nichols
2010-08-11
Michael D Martin
Undercut mechanism at Cr-Au interface
Robert MacDonald
2010-08-10
Does anyone out there know of any good academic papers on the chemistry
of undercut at a Cr-Au interface? This is a classic problem with this
metalization scheme. I have seen lateral etch ratios in this material
system in excess of 1000:1. I wonder that it isn't a matter of the
electrochemisty of the Cr-Au system. I have not been able to find any
papers which study this issue, but I'm sure they are out there. If
anyone knows of a good source I'd appreciate it.

Rob MacDonald
Shearwater Scientific
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