Hi:

To strip PMMA using wet chemistry you can use any of chemicals listed below.
If you need any other help feel free to contact me.

1. Acetone
2. Xylene
3. Butyl Acetate
4. We have also developed our own PMMA stripper which works just great.

Regards
Jayant Neogi
**********************************************************
Jayant Neogi
Director: Research and Development
NORSAM Technologies
Ph#  (503) 640-0586
Fax# (503) 640-8117
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-----Original Message-----
From: ¹Úâ¹Î 
To: [email protected] 
Date: Thursday, October 29, 1998 10:07 AM
Subject: About PMMA.....


>
>Hello.
>My question which chemical etches the PMMA.
>I use PMMA as resist, And I want to remove PMMA some.
>So to say, I have 100 nm thickness PMMA layer, and I want to
>etch the PMMA about 30 nm thickness.
>I know that the Oxygen RIE can this, but I want to know
>the wet etching method not dry etching method.
>I think some chemicals could do it.
>I want to know which chemicals does that.
>sincerely yours.
>I wait your answer, thank you..
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