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MEMSnet Home: MEMS-Talk: etch depth control having no etch stop layer
etch depth control having no etch stop layer
2010-09-02
杜 彦召
2010-09-03
Edouard Duriau
2010-09-02
Albert Henning
2010-09-02
Brad Cantos
etch depth control having no etch stop layer
Brad Cantos
2010-09-02
Just to add to Al's remarks, to make sure this works repeatably you will want to
use the same size wafer with the same etch pattern on the test wafer and the
"real" wafer to avoid being thrown off by any loading or other effects.

Brad Cantos
[email protected]
http://holage.com




On 2 Sep 2010, at 9:22 AM, Albert Henning wrote:

> Timed etch:  Process a test wafer; measure the depth; re-adjust the time
> for your 'real' wafer.
>
> Al Henning
> NanoInk
reply
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