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MEMSnet Home: MEMS-Talk: Selective Etching of Gold onto Titanium layer
Selective Etching of Gold onto Titanium layer
2010-09-13
Edmondo Battista
2010-09-13
Robert Ditizio
Selective Etching of Gold onto Titanium layer
Edmondo Battista
2010-09-13
Dear All,

I would realize patterned structures by selective etching of a nanometric
(10/20/30nm) gold layer deposited onto a titanium layer.

I read some protocols to etch chemically the gold but my question is how
selective is the process toward the gold rather than titanium?

Does anyone know companies that are able to deposit  and pattern in the metal
layer?

Thank you in advance.

Bests
Ed
reply
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