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MEMSnet Home: MEMS-Talk: Ni adhesion to Si
Ni adhesion to Si
2010-09-14
Salam Gabran
2010-09-14
Ruiz, Marcos Daniel (SENCOE)
2010-09-15
Ned Flanders
2010-09-15
[email protected]
2010-09-15
Denis Petrov
2010-09-15
Xiaohui Lin
2010-09-15
George P. Watson
2010-09-20
Salam Gabran
Ni adhesion to Si
Xiaohui Lin
2010-09-15
You may also try Ti/Ni combanation. It works fine for me.

2010/9/15 Denis Petrov 

> Hi!
>
> Ni has bad adhesion to Cr but good to gold. So, you could try to
> sputter first say 15 nm of Cr followed by 80 nm of Gold. And then your
> Ni.
>
> Regards,
>
> Denis

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: [email protected]
Office: (512) 471-4349
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