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MEMSnet Home: MEMS-Talk: native Si oxide thickness vs. time
native Si oxide thickness vs. time
2010-09-15
Ned Flanders
2010-09-15
shay kaplan
2010-09-16
Ned Flanders
native Si oxide thickness vs. time
Ned Flanders
2010-09-15
Hi all,

say you dip a  wafer in HF/BHF for a few seconds, pull it out,
rins with DI water and start your stopwatch (t=0). How quickly will
the native oxide layer grow at nominal conditions (room temp, 1 atm)?
How thick will it be after 1 day, 1 week, 1 year... etc?

Any info would be very interesting. Thanks a lot.
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