SiH2Cl2 is routinely used in LPCVD; can it also work in PECVD?

Also, have you considered a liquid source - like TEOS?  I've worked at a company
that used TEOS to deposit PECVD oxide.

Dan

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Javier Sesé
Sent: Friday, September 17, 2010 11:29 AM
To: General MEMS discussion
Subject: [mems-talk] PECVD SiN wiithout Silane?


 Hi all,

Silane gas is very dangerous even when diluted at 1%. Does any one know
any recipe to grow Silicon Nitride in a PECVD machine without including
Silane gas?

Thank you,

Javier