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MEMSnet Home: MEMS-Talk: Selective Poly etch for P+
Selective Poly etch for P+
2010-09-21
morad massalha
2010-09-21
Morrison, Richard H., Jr.
2010-09-21
morad massalha
2010-09-21
Morrison, Richard H., Jr.
Selective Poly etch for P+
morad massalha
2010-09-21
I have read about this mix that etch P+ 1E18 and stop on P- (1E14).  I tried
this
while etching a silicon wafer with EPI. I took silicon and I put it in the mix
for 5
min. The result was that wafer etched on both sides with same thickness. Maybe
from P+ etched more about 30%, but I did not get any selectivity between P- and
P+.  Can somebody explain this please.



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