A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Cu plating on Ag sputtered substrate
Cu plating on Ag sputtered substrate
2010-09-24
Mingke Xiong
Cu plating on Ag sputtered substrate
Mingke Xiong
2010-09-24
Hi Everyone,

I am currently attempting a Cu electroplating on PCBs. Patterns were firstly
etched from the Cu foil onto the dielectrics. A layer of Ag was sputtered onto
the subtrate and then the 2nd litho. What I am trying to do is to plating Cu
into the photoresist trenches (100~200um wide). But the Ag layer seemed to be
etched away before the copper was plated. I thickened the Ag layer by 2 or 3
times, the Cu plating started but the film was quite non-uniform. My guess is
the potential dropped too fast to plate the Cu in some areas but I already have
the cathode connect to all the edges of the PCB so supposely it shouldn't be an
issue.

Anyway, does anyone have any suggestions on how to improve the uniformity of the
Cu plating onto thin Ag layer? Should I increase the current density?

Appreciate your help.

Regards,

Mingke Xiong
AEM, Inc.
6610 Cobra Way
San Diego, CA 92121, USA
858-481-0210 (1660)
www.aem-usa.com
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMStaff Inc.
Addison Engineering
MEMS Technology Review